TY  - BOOK
AU  - Hsu, Tai Ran 
TI  - Mems & microsystems design and manufacture 
SN  - 0-07-046709-X 
U1  - 670 HSU  
PY  - 2002///
CY  - Tata mcgrow hill 
PB  - New Delhi 
KW  - MICROPROCESSOR
ER  -