Hsu, Tai Ran  <br/><br/>
Mems & microsystems design and manufacture  

 - Tata mcgrow hill   New Delhi   2010 
 - XII, 436p.   475 
<br/><br/><label>ISBN: </label>0-07-046709-X  
<br/><br/><label>Subjects--Topical Terms: </label><br/>MICROPROCESSOR 
<br/><br/><label>Dewey Class. No.: </label>670 HSU