TY  - BOOK
AU  - Hsu, Tai Ran 
TI  - MEMS and microsystem design and manufacture 
SN  - 9780070487093
U1  - 670 HSU  
PY  - 2010///
CY  - Tata mcgraw hill company Ltd 
PB  - New Delhi 
KW  - Production Technology
ER  -