Hsu, Tai Ran  <br/><br/>
MEMS and microsystem design and manufacture  

 - Tata mcgraw hill company Ltd   New Delhi   2010 
 - XII, 436p.   590 
<br/><br/><label>ISBN: </label>9780070487093 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Production Technology 
<br/><br/><label>Dewey Class. No.: </label>670 HSU