| 000 | 00398nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 220217s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a9780070487093 | ||
| 082 | _a670 HSU | ||
| 100 |
_aHsu, Tai Ran _93030 |
||
| 245 | 0 | _aMEMS and microsystem design and manufacture | |
| 260 |
_aTata mcgraw hill company Ltd _bNew Delhi _c2010 |
||
| 300 |
_aXII, 436p. _b590 |
||
| 650 | _aProduction Technology | ||
| 999 |
_c183933 _d183933 |
||